Optimized design and process for making a DC voltage reference based on MEMS

Author

Kärkkäinen, Anu ; Awan, Shakil A. ; Kyynäräinen, Jukka ; Pekko, Panu ; Oja, Aarne S. ; Seppä, Heikki

Author_Institution

VTT Inf. Technol., Finland

Volume

54

Issue

2

fYear

2005

fDate

4/1/2005 12:00:00 AM

Firstpage

563

Lastpage

566

Abstract

A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.

Keywords

capacitors; feedback; measurement standards; reference circuits; silicon-on-insulator; voltage measurement; DC voltage reference; MEMS; capacitive microelectromechanical system; capacitive sensors; improved feedback electronics; micromachining; micromechanical moving plate capacitor; silicon-on-insulator process; Capacitors; Design optimization; Feedback; Manufacturing processes; Microelectromechanical systems; Micromechanical devices; Process design; Silicon on insulator technology; Stability; Voltage; Capacitive sensors; feedback electronics; microelectromechanical systems (MEMS); micromachining; silicon-on-insulator (SOI);

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/TIM.2004.843097

Filename

1408234