New collector undercut technique using a SiN sidewall for low base contact resistance in InP/InGaAs SHBTs

Author

Lee, Kyungho ; Yu, Daekyu ; Chung, Minchul ; Kang, Jongchan ; Kim, Bumman

Author_Institution

Dept. of Electron. & Electr. Eng., Pohang Univ. of Sci. & Technol., South Korea

Volume

49

Issue

6

fYear

2002

fDate

6/1/2002 12:00:00 AM

Firstpage

1079

Lastpage

1082

Abstract

A new collector undercut process using SiN protection sidewall has been developed for high speed InP/InGaAs single heterojunction bipolar transistors (HBTs). The HBTs fabricated using the technique have a larger base contact area, resulting in a smaller DC current gain and smaller base contact resistance than HBTs fabricated using a conventional undercut process while maintaining low C_bc. Due to the reduced base contact resistance, the maximum oscillation frequency (f_max) has been enhanced from 162 GHz to 208 GHz. This result clearly shows the effectiveness of this technique for high-speed HBT process, especially for the HBTs with a thick collector layer, and narrow base metal width

Keywords

III-V semiconductors; S-parameters; contact resistance; current density; gallium arsenide; heterojunction bipolar transistors; indium compounds; microwave bipolar transistors; sputter etching; 0.5 to 40 GHz; DC current gain; InP-InGaAs; RIE; SEM; SiN; base contact resistance; collector undercut process; current-voltage curves; high speed HBT; larger base contact area; low parasitic interconnection; microwave S-parameters; narrow base metal width; protection sidewall; selective etch; small-signal parameters; solid source molecular beam epitaxy; surface recombination; thick collector layer; Charge pumps; Contact resistance; Etching; Heterojunction bipolar transistors; Indium gallium arsenide; Indium phosphide; MOSFET circuits; Protection; Silicon compounds; Very large scale integration;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/TED.2002.1003753

Filename

1003753