RF MEMS phase shifters: design and applications

Author

Rebeiz, Gbriel M. ; Tan, Guan-Leng ; Hayden, Joseph S.

Author_Institution

Michigan Univ., Ann Arbor, MI, USA

Volume

3

Issue

2

fYear

2002

fDate

6/1/2002 12:00:00 AM

Firstpage

72

Lastpage

81

Abstract

Recent results obtained with MEMS phase shifters demonstrate that their performance is much better than GaAs phase shifters using either standard (switched-line, reflect-line) or distributed designs. The reliability of MEMS phase shifters is worse than of single switches since they employ 8-16 MEMS switches and do not tolerate a failure in any of the switches. On the other hand, a large phased array will still function properly, albeit with a slightly decreased efficiency and higher sidelobes if 3-4% of the phase shifters fail. Currently, the failure mechanisms of MEMS switches are being investigated and will greatly benefit the reliability of MEMS phase shifters. Also, the hermetic packaging of MEMS phase shifters is not straightforward, due to their relatively large size. It is for these reasons that the authors believe that MEMS phase shifters will be mostly used in satellite and defense applications in the next five years

Keywords

micromechanical devices; microwave phase shifters; microwave switches; semiconductor device packaging; semiconductor device reliability; MEMS switches; MEMS-based phased array; RF MEMS phase shifters; distributed phase shifter; packaging; reflect arrays; reliability; switched-line phase shifter; Failure analysis; Gallium arsenide; Micromechanical devices; Microswitches; Packaging; Phase shifters; Phased arrays; Radiofrequency microelectromechanical systems; Satellites; Switches;

fLanguage

English

Journal_Title

Microwave Magazine, IEEE

Publisher

ieee

ISSN

1527-3342

Type

jour

DOI

10.1109/MMW.2002.1004054

Filename

1004054