Fully CMOS integrated low voltage 100 MHz MEMS resonator

Author

Uranga, A. ; Teva, J. ; Verd, J. ; López, J.L. ; Torres, F. ; Esteve, J. ; Abadal, G. ; Pérez-Murano, F. ; Barniol, N.

Author_Institution

Dept. of Electron. Eng., Univ. Autonoma de Barcelona, Spain

Volume

41

Issue

24

fYear

2005

Firstpage

1327

Lastpage

1328

Abstract

The development of a novel fully integrated microelectromechanical system (MEMS) for RF purposes is presented. It is composed of a paddle polysilicon micro-resonator electrostatically excited and a capacitive CMOS read-out amplifier. The micro-resonator is fabricated directly on a commercial CMOS technology, only requiring a wet etching process for the release of the resonant structure after the full CMOS integration. Electrical characterisation of the on-chip resonant device has been performed showing a resonance frequency near 100 MHz.

Keywords

CMOS integrated circuits; etching; micromechanical resonators; radiofrequency amplifiers; radiofrequency integrated circuits; readout electronics; 100 MHz; CMOS integrated circuits; MEMS resonator; capacitive CMOS read-out amplifier; electrostatic devices; full CMOS integration; low-power electronics; microelectromechanical systems; micromechanical resonators; paddle polysilicon micro-resonators; radiofrequency amplifiers; radiofrequency integrated circuits; readout electronics; wet etching process;

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el:20053473

Filename

1550115