Heterogeneous process simulation tool integration

Author

Sahul, Zakir H. ; Wang, Kenneth C. ; Hsiau, Ze-Kai ; McKenna, Eugene W. ; Dutton, Robert W.

Author_Institution

Integrated Circuits Lab., Stanford Univ., CA, USA

Volume

9

Issue

1

fYear

1996

fDate

2/1/1996 12:00:00 AM

Firstpage

35

Lastpage

48

Abstract

An unified strategy for achieving heterogeneous tool integration within the technology computer-aided design (TCAD) realm is presented. Geometry, grid and surface mesh servers are defined and implemented in a program that contains the different data and provides common services for TCAD applications. These services form the backbone of the integration framework. Functional abstraction is used to provide unified access to the servers´ data and procedures. The role of each server and their interactions, including those with applications, are delineated. Existing tools such as SUPREM-IV and SPEEDIE, together with new tools have been integrated to illustrate the utility and versatility of the approach. This paper discusses the integration strategy, shows results and fully specifies standard functional server interfaces needed for TCAD tool integration

Keywords

CAD; semiconductor process modelling; SPEEDIE; SUPREM-IV; TCAD program; functional abstraction; functional server interfaces; geometry server; grid server; heterogeneous tool integration; process simulation; surface mesh server; technology computer-aided design; Application software; Computational modeling; Design automation; Equations; Etching; Geometry; Numerical simulation; Oxidation; Solid modeling; Spine;

fLanguage

English

Journal_Title

Semiconductor Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/66.484281

Filename

484281