DocumentCode
757814
Title
Proton Radiation Effects on MEMS Silicon Strain Gauges
Author
Marinaro, Damian G. ; McMahon, Phillip ; Wilson, Alan
Author_Institution
Defence Sci. & Technol. Organ., Port Melbourne, VIC
Volume
55
Issue
3
fYear
2008
fDate
6/1/2008 12:00:00 AM
Firstpage
1714
Lastpage
1718
Abstract
A microelectromechanical system (MEMS) strain gauge constructed from single-crystalline silicon has been developed for application in aircraft structural-health-monitoring. The effects of proton irradiation on the piezoresistive elements of the silicon strain gauges are examined. Degradation in the piezoresistive response at applied strains above 2000 microstrain is observed.
Keywords
aircraft; condition monitoring; micromechanical devices; piezoresistance; proton effects; silicon; strain gauges; structural engineering; MEMS silicon strain gauges; Si; aircraft structural-health-monitoring; piezoresistive elements; proton radiation effects; single-crystalline silicon; Aerospace electronics; Aircraft manufacture; Capacitive sensors; Ionizing radiation; Micromechanical devices; Piezoresistance; Piezoresistive devices; Proton radiation effects; Radiation effects; Silicon; Micromechanical devices; piezoresistive devices; radiation effects;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.2008.921933
Filename
4545162
Link To Document