DocumentCode
758337
Title
A computational study of radiometric phenomena for powering microactuators with unlimited displacements and large available forces
Author
Wadsworth, Dean C. ; Muntz, E. Phillip
Author_Institution
Phillips Lab., Edwards AFB, CA, USA
Volume
5
Issue
1
fYear
1996
fDate
3/1/1996 12:00:00 AM
Firstpage
59
Lastpage
65
Abstract
Microactuators utilizing radiometric forces are described. A candidate actuator formed from a series of vanes mounted on an armature positioned between two closely spaced bounding surfaces was assumed for the study. Controlled heating of the vanes or portions of the bounding surfaces generates a rarefied gas dynamic force leading to a displacement of the vanes and armature. Parametric direct simulation Monte Carlo calculations have been obtained to estimate the performance of a nominal actuator and assess its sensitivity to rarefaction (controlled by a combination of actuator size and ambient gas pressure), vane configuration (inclination and placement), and location of energy input. Results show that the proposed class of actuators can provide relatively large available forces and, at least in principle, unlimited, reversible displacements
Keywords
Monte Carlo methods; microactuators; radiometry; rarefied fluid dynamics; Monte Carlo calculations; ambient gas pressure; armature; available forces; bounding surfaces; microactuators; parametric direct simulation; radiometric phenomena; rarefaction; rarefied gas dynamic force; reversible displacements; unlimited displacements; vanes; Actuators; Blades; Displacement control; Force control; Heating; Microactuators; Monte Carlo methods; Pressure control; Radiometry; Temperature control;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/84.485217
Filename
485217
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