Electrooptic characteristics of thin-film PLZT waveguide using ridge-type Mach-Zehnder modulator

Author

Thapliya, Roshan ; Okano, Yasunori ; Nakamura, Shigetoshi

Author_Institution

Adv. Devices & Mater. Lab., Fuji Xerox Co. Ltd., Kanagawa, Japan

Volume

21

Issue

8

fYear

2003

Firstpage

1820

Lastpage

1827

Abstract

The design, characterization, and drift due to electrical bias (DC drift) of thin-film lanthanum-doped lead zirconate titanate (PLZT) waveguide is reported using a Mach-Zehnder modulator. The mechanism of the electrooptic responses based on hysteresis of the applied field is proposed to understand the behavior of the device. It is shown that the thin film exhibits a Kerr effect having a coefficient value of 5×10^-18 (m/V)². It is reported that by utilizing hydrogen-deficient dry etching, the DC drift is improved by a factor of 3.5. In addition, the verification of the operation of a PLZT-based device for more than 1400 h at 70°C is reported, for the first time.

Keywords

electro-optical modulation; hysteresis; integrated optics; lanthanum compounds; lead compounds; optical Kerr effect; optical films; optical waveguides; ridge waveguides; 1400 h; 70 degC; DC drift; Kerr effect; Mach-Zehnder modulator; PLZT; PLZT waveguide; PLZT-based device; PbLaZrO3TiO3; applied field; electrical bias; electrooptic characteristics; electrooptic responses; hydrogen-deficient dry etching; hysteresis; ridge-type Mach-Zehnder modulator; thin film; thin-film PLZT waveguide; thin-film lanthanum-doped lead zirconate titanate waveguide; Dry etching; Electrooptic effects; Electrooptic modulators; Electrooptical waveguides; Fabrication; Ferroelectric materials; Hysteresis; Lead; Titanium compounds; Transistors;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/JLT.2003.815511

Filename

1219552