Improved threshold characteristics of air-post vertical-cavity surface-emitting lasers using unique etching process

Author

Clausen, E.M. ; Von Lehmen, Ann ; Chang-Hasnain, Constance ; Harbison, J.P. ; Florez, L.T.

Author_Institution

Bellcore, Red Bank, NJ, USA

Volume

27

Issue

24

fYear

1991

Firstpage

2243

Lastpage

2245

Abstract

Vertical-cavity surface emitting lasers (VCSELs) are a new laser technology which has the potential to provide high-speed low-cost technology for optical interconnects in next-generation computing and switching systems. The use of a thermal chlorine etch to improve the surface condition of air-post vertical cavity surface emitting lasers (VCSELs) is reported. As much as a factor of three improvement in MBE-grown GaAs-InGaAs VCSEL thresholds is obtained. In 9 mu m diameter devices, submilliamp thresholds and milliwatt-level maximum output powers have been achieved.

Keywords

III-V semiconductors; etching; gallium arsenide; indium compounds; laser cavity resonators; optical workshop techniques; semiconductor junction lasers; semiconductor technology; 9 micron; AlAs; GaAs; GaAs-InGaAs; MBE-grown; air-post; etching process; high-speed; low-cost technology; milliwatt-level maximum output powers; optical interconnects; semiconductor lasers; submilliamp thresholds; thermal Cl₂ etching; threshold characteristics; vertical-cavity surface-emitting lasers;

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el:19911388

Filename

109512