Influence of plasma extraction on a cylindrical low-pressure RF discharge: a PIC-MC study

Author

Krimke, Ralf ; Urbassek, Herbert M.

Author_Institution

Fachbereich Phys., Kaiserslautern Univ., Germany

Volume

23

Issue

1

fYear

1995

fDate

2/1/1995 12:00:00 AM

Firstpage

103

Lastpage

109

Abstract

A model is presented for plasma extraction from a cylindrical RF discharge. Even though the extraction geometry is two-dimensional, the model proposed here allows to discuss extraction in a one-dimensional geometry. Specific results are obtained for a low-pressure RF discharge between cylindrical electrodes with a high asymmetry. These are calculated with the help of a PIC-MC computer simulation. The influence of extraction on the plasma characteristics, the ionization efficiency, and the influence of an axial magnetic field are calculated and discussed

Keywords

Monte Carlo methods; discharges (electric); high-frequency discharges; plasma diagnostics; plasma production; plasma properties; plasma simulation; PIC-MC study; axial magnetic field; cylindrical electrodes; cylindrical low-pressure RF discharge; ionization efficiency; particle-in cell Monte Carlo study; plasma characteristics; plasma extraction; Electrodes; Electrons; Fault location; Geometry; Magnetic fields; Particle beams; Plasma properties; Plasma simulation; Radio frequency; Solid modeling;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.376567

Filename

376567