DocumentCode
76501
Title
Electronegativity of Hollow Cathode DC Discharge in
Employing Electrostatic Probe Diagnostics
Author
Mondragon, Aidee Berenice ; Rodriguez-Legorreta, Jannet ; Yousif, Farook Bashir ; Fuentes, Beatriz Elizabeth ; Valencia, Horacio Martinez ; Islas, Marco Antonio Rivera
Author_Institution
Facultad de Ciencias, Universidad Autonoma del Estado de Morelos, Cuernavaca, Mexico
Volume
41
Issue
8
fYear
2013
fDate
Aug. 2013
Firstpage
2387
Lastpage
2393
Abstract
Electron temperature and number density are investigated employing hollow cathode dc discharge in
. Electron temperature is found to decrease from 3 to 1.85 eV as the pressure increases from 75 to 375 mTorr. Positive and negative ion densities are determined as a function of plasma gas pressure.
curves are evaluated employing the Allen–Boyd–Reynolds (ABR), current balance, orbital motion limited, and the floating potential (FP) methods. The ABR method is found to yield the highest positive ion number density, whereas the FP method results for
are extremely small for any meaningful data. Present results are compared to those obtained employing global simulation method as well as with other experimental groups.
electronegativity results are compared with other experimental and theoretical groups. Optical emission spectroscopy is employed and intensity ratio for the 777 and 845-nm lines is obtained for comparison with other groups concluding that
is the dominant species.
Keywords
Discharges (electric); Ions; Oxygen; Plasma diagnostics; Plasma temperature; Probes; Electron temperature; electronegativity; ion density; plasma diagnostics;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2013.2260179
Filename
6576269
Link To Document