A Novel Magnetic Microdeflector for Electron Beam Control in Electron Beam Microcolumn Systems

Author

Rong, Rong ; Kim, Ho Seob ; Park, Seong Soon ; Hwang, Nam Woo ; Kim, Byung Jin ; Ahn, Chong H.

Author_Institution

MicroSyst. & BioMEMS Lab., Univ. of Cincinnati

Volume

42

Issue

10

fYear

2006

Firstpage

3237

Lastpage

3239

Abstract

A novel micromachined magnetic deflector has been developed for controlling electron beam deflection in an electron beam microcolumn system (EBMCS). The deflector consists of four electromagnetic micropoles which can be controlled by solenoid-type microinductors. They are divided into two pairs which control the deflection of the electron beam in the X- and Y-axes. The microinductor formed by the micromachined solenoid coil has an NiFe magnetic core which produces a highly concentrated magnetic field in the bore area. This magnetic microdeflector has been integrated with an electron beam microcolumn for electron beam control. Experimental results showed that the deflection of the electron beam increased linearly to 100 mum with a driving current of 50 mA and a power consumption of only 2.5 mW. The magnetic deflector demonstrated good performance in controlling the electron beam deflection

Keywords

electron beam applications; electron beam focusing; micromachining; micromechanical devices; 2.5 mW; 50 mA; EBMCS; MEMS; NiFe; electromagnetic micropoles; electron beam control; electron beam deflection; electron beam micro-column system; magnetic microdeflector; microelectromechanical systems; microfabrication; solenoid-type microinductors; Boring; Coils; Control systems; Electron beams; Lorentz covariance; Magnetic cores; Magnetic fields; Magnetic flux; Micromagnetics; Solenoids; Electron beam; magnetic deflector; microcolumn system; microelectromechanical systems (MEMS); microfabrication;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2006.878426

Filename

1704585