Magnetic and Thermal Properties of MoN Underlayer for Spin Valves Depending on Nitrogen Concentration

Author

Kim, J. ; Choi, Y. ; Jo, S. ; Kim, S.Y. ; Lee, C.W.

Author_Institution

Sch. of Electonic Eng., Soongsil Univ.

Volume

42

Issue

10

fYear

2006

Firstpage

3267

Lastpage

3269

Abstract

We incorporated nitrogen in the Mo underlayer and investigated the effect of nitrogen concentration on the magnetic properties and annealing behavior of the spin valve devices. The spin valve structure was Si/SiO₂/Mo(MoN)(35Aring)/NiFe(21 Aring)/CoFe(28 Aring)/Cu(22 Aring)/CoFe(18 Aring)/IrMn(65 Aring)/Ta(25Aring). It is concluded that MoN underlayer is magnetically as good as Ta underlayer for N₂ gas flow rate of less than 6 sccm

Keywords

cobalt alloys; iron alloys; magnetic annealing; magnetic multilayers; manganese alloys; molybdenum compounds; nickel alloys; silicon compounds; spin valves; tantalum alloys; thermal properties; MoN; N₂; Si-SiO₂-Mo(MoN)-NiFe-CoFe-Cu-CoFe-IrMn-Ta; annealing behavior; diffusion barrier; magnetic property; nitrogen concentration; spin valves; thermal property; Annealing; Conductivity; Fluid flow; Giant magnetoresistance; Magnetic field measurement; Magnetic films; Magnetic properties; Nitrogen; Spin valves; Substrates; Diffusion barrier; GMR; IrMn; MoN films; spin valve; underlayer;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2006.879148

Filename

1704595