Fabrication of Co-Cr Films with Large Perpedicular Anisotropy by Using a Roll-Coater Sputtering System

The crystal orientation and perpendicular magnetic anisotropy in Co-Cr films, sputtered in such a manner that a composition gradient exists in the depth direction, were studied. By making the initially deposited layer Cr-rich compared to material subsequently deposited on the substrate, which is in constant motion relative to the target, an effect equivalent to a base layer controlling the film crystal orientation was achieved. Compared with films of uniform composition, improved perpendicular magnetic anisotropy and crystal orientation were realized.