DocumentCode
771770
Title
Specific contact resistivity of InGaAs/InP p-isotype heterojunctions
Author
Bowers, John E. ; Hafich, M.J. ; Silvestre, P. ; Woods, L.M. ; Robinson, G.Y.
Volume
28
Issue
17
fYear
1992
Firstpage
1568
Lastpage
1570
Abstract
The specific contact resistivity of lattice matched InGaAs/InP p-isotype heterojunction has been measured through the use of an interface transmission line model structure. The measured resistance values are comparable to or greater than those of the metal/semiconductor interface and depend heavily on the doping and the abrupt or graded nature of the interface.
Keywords
III-V semiconductors; contact resistance; gallium arsenide; indium compounds; ohmic contacts; semiconductor junctions; InGaAs-InP; doping; graded interface; hole transport; interface transmission line model structure; low resistance ohmic contacts; p-isotype heterojunctions; specific contact resistivity;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19920998
Filename
156256
Link To Document