Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane

Author

Yanagitani, Takahiko ; Mishima, Natsuki ; Matsukawa, Mami ; Watanabe, Yoshiaki

Author_Institution

Fac. of Eng., Doshisha Univ., Kyoto

Volume

54

Issue

4

fYear

2007

fDate

4/1/2007 12:00:00 AM

Firstpage

701

Lastpage

704

Abstract

The (112macr0) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k₁₅ are obtained by sputter deposition. An overmoded resonator, a layered structure of metal electrode film/(112macr0) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k₁₅ by a resonant spectrum method. The (112macr0) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k₁₅ of 0.24. This value was 92% of k₁₅ value in single-crystal (k₁₅ = 0.26)

Keywords

acoustic resonators; bulk acoustic wave devices; piezoelectric materials; piezoelectric thin films; piezoelectricity; sputter deposition; texture; zinc compounds; (112macr0) textured piezoelectric film; Cu-ZnO-Al-SiO₂; Cu-ZnO-Cu-SiO₂; SiO₂; electromechanical coupling coefficient; metal electrode film; resonant spectrum method; silica glass substrate; sputter deposition; Crystallization; Electrodes; Film bulk acoustic resonators; Frequency; Piezoelectric films; Resonance; Sputtering; Substrates; Temperature; Zinc oxide;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2007.303

Filename

4154630