Formation properties of the main-discharge in pure Ar gas using the automatically preionized plasma electrode

Author

Hong, Sung Ki ; Hayashi, Nobuya ; Ihara, Satoshi ; Satoh, Saburoh ; Yamabe, Chobei

Author_Institution

Dept. of Electr. & Electron. Eng., Saga Univ., Japan

Volume

33

Issue

2

fYear

2005

fDate

4/1/2005 12:00:00 AM

Firstpage

324

Lastpage

325

Abstract

In order to develop the discharge-pumped Ar₂^* excimer laser, images of discharge properties in relatively low-pressure (1∼5 atm) pure Ar gas were obtained using the automatically preionized (API) plasma electrode. The API plasma electrode has a rod-type preionization electrode covered with a ceramic pipe as dielectric and is 74 cm long. The effect of the dielectric capacitance of the ceramic pipe on the API plasma electrode is determined.

Keywords

argon; capacitance; electrodes; excimer lasers; plasma instability; preionisation; surface discharges; 74 cm; Ar; automatically preionized plasma electrode; ceramic pipe; dielectric capacitance; discharge-pumped Ar₂ excimer laser; low-pressure pure Ar gas; main-discharge formation properties; rod-type preionization electrode; Argon; Capacitance; Cathodes; Ceramics; Dielectrics; Electrodes; Laser stability; Plasma properties; Plasma stability; Surface discharges; Electric discharge pumping; electrodes; preionization;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2005.845926

Filename

1420458