• DocumentCode
    776969
  • Title

    Optical Diagnostics of Semiconductors

  • Author

    Fouquet, J.E. ; Merz, J.L.

  • Volume
    1
  • Issue
    4
  • fYear
    1995
  • Firstpage
    977
  • Keywords
    Optical films; Optical interferometry; Optical refraction; Optical scattering; Optical sensors; Optical variables control; Production; Semiconductor devices; Surface emitting lasers; Vertical cavity surface emitting lasers;
  • fLanguage
    English
  • Journal_Title
    Selected Topics in Quantum Electronics, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    1077-260X
  • Type

    jour

  • DOI
    10.1109/JSTQE.1995.488394
  • Filename
    488394