• DocumentCode
    777043
  • Title

    Microdischarge devices with a nanoporous Al2O3 dielectric: operation in Ne and air

  • Author

    Park, S.-J. ; Eden, J.G.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Illinois, Urbana, IL, USA
  • Volume
    33
  • Issue
    2
  • fYear
    2005
  • fDate
    4/1/2005 12:00:00 AM
  • Firstpage
    572
  • Lastpage
    573
  • Abstract
    Nanoporous alumina, grown by wet chemical processing on aluminum foil, has been found to be a superior dielectric for microdischarge devices. Devices in which both the Al anode and cathode are encapsulated with this dielectric, and the microcavities are cylindrical with a diameter of 100-300 μm, operate stably in 700 torr of Ne and one atmosphere of air.
  • Keywords
    alumina; discharges (electric); plasma instability; plasma pressure; plasma production; 1 atm; 100 to 300 mum; 700 torr; Al anode; Al cathode; Al2O3; cylindrical microcavities; microdischarge devices; nanoporous Al2O3 dielectric; nanoporous alumina; wet chemical processing; Aluminum; Chemical processes; Dielectric devices; Electrodes; Microcavities; Nanoporous materials; Nonhomogeneous media; Optical arrays; Optical devices; Optical refraction; Alumina; dielectric; microcavity; microdischarges;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2005.845268
  • Filename
    1420582
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=777043