Photonic bands in patterned silicon-on-insulator waveguides

Author

Patrini, M. ; Galli, M. ; Marabelli, F. ; Agio, M. ; Andreani, L.C. ; Peyrade, D. ; Chen, Yong

Author_Institution

INFM & Dipt. di Fisica "A. Volta", Universita degli Studi di Pavia, Italy

Volume

38

Issue

7

fYear

2002

fDate

7/1/2002 12:00:00 AM

Firstpage

885

Lastpage

890

Abstract

One- and two-dimensional photonic crystals are obtained by electron beam lithography and reactive ion etching on silicon-on-insulator waveguides. Variable-angle reflectance is measured and calculated in the 0.2-2-eV energy range, giving evidence of the quasi-guided modes of the photonic structure. Photonic bands in the one-dimensional case are determined and compare very well to those calculated with an expansion on the basis of the waveguide modes

Keywords

electron beam lithography; optical fabrication; optical waveguides; photonic band gap; reflectivity; reflectometry; silicon; silicon-on-insulator; sputter etching; 0.2 to 2 eV; 1D photonic crystals; 2D photonic crystals; electron beam lithography; patterned silicon-on-insulator waveguides; photonic bands; photonic structure; quasi-guided modes; reactive ion etching; silicon-on-insulator waveguides; variable-angle reflectance; waveguide modes; Electromagnetic waveguides; Electron beams; Etching; Lithography; Optical surface waves; Optical waveguides; Photonic crystals; Reflectivity; Resonance; Silicon on insulator technology;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/JQE.2002.1017602

Filename

1017602