Design method for sensing body of differential pressure transmitter using silicon diaphragm-type pressure sensor

Author

Matsuoka, Y. ; Yamamoto, Y. ; Tobita, T. ; Shimada, S. ; Yasukawa, A.

Author_Institution

Instrum. Div., Hitachi Ltd., Ibaraki, Japan

Volume

44

Issue

3

fYear

1995

fDate

6/1/1995 12:00:00 AM

Firstpage

791

Lastpage

794

Abstract

This paper describes a design method for the three-diaphragm-type sensing body of a differential pressure transmitter. This sensing body protects the silicon diaphragm-type pressure sensor from over-pressure. The design method includes information on how to decide the stiffness of each metal diaphragm and the liquid quantity needed to fill the sensing body. The differential pressure transmitter, with significant stabilities, has zero-influence errors of static pressure and over-pressure of less than -0.2% and ±0.1%, respectively, and is obtained at a measuring span of 25 kPa and a line pressure of 15 MPa

Keywords

electric sensing devices; elemental semiconductors; high-pressure techniques; pressure measurement; pressure sensors; pressure transducers; silicon; 15 MPa; 25 kPa; Si; Si diaphragm-type pressure sensor; differential pressure transmitter; line pressure; metal diaphragm; over-pressure; static pressure; stiffness; three-diaphragm-type sensing body; zero-influence errors; Design methodology; Piezoresistance; Pressure measurement; Protection; Seals; Sensor phenomena and characterization; Silicon; Springs; Stability; Transmitters;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.387334

Filename

387334