Construction and Experimental Implementation of a Model-Based Inverse Filter to Attenuate Hysteresis in Ferroelectric Transducers

Hysteresis and constitutive nonlinearities are inherent properties of ferroelectric transducer materials due to the noncentrosymmetric nature of the compounds. In certain regimes, these effects can be mitigated through restricted input fields, charge- or current-controlled amplifiers, or feedback designs. For general operating conditions, however, these properties must be accommodated in models, transducer designs, and model-based control algorithms to achieve the novel capabilities provided by the compounds. In this paper, we illustrate the construction of inverse filters, based on homogenized energy models, which can be used to approximately linearize the piezoceramic transducer behavior for linear design and control implementation. Attributes of the inverse filters are illustrated through numerical examples and experimental open loop control implementation for an atomic force microscope stage