Electron-cyclotron resonance etching of mirrors for ridge-guided lasers

Author

Swanson, P.D. ; Shire, D.B. ; Tang, C.L. ; Parker, M.A. ; Kimmet, J.S. ; Michalak, R.J.

Author_Institution

Sch. of Electr. Eng., Cornell Univ., Ithaca, NY, USA

Volume

7

Issue

6

fYear

1995

fDate

6/1/1995 12:00:00 AM

Firstpage

605

Lastpage

607

Abstract

Etched laser mirrors are important for the monolithic integration of lasers in optical circuits without cleaved facets. Electron cyclotron resonance (ECR) etching is ideal for opto-electronic fabrication since the etching parameters are independently adjustable and a variety of masking materials are available for creating multiple etch depths, e.g., for etched ridge lasers with etched mirror facets. We report on the fabrication and characterization of ECR etched laser mirrors and waveguides. The quality of the ECR etch is ascertained by measuring the reflection coefficients of 90/spl deg/ turning mirrors in GaAs-AlGaAs multiple-quantum-well (MQW) lasers incorporating multiple numbers of 90/spl deg/ bends. The average reflection coefficient is found to be approximately 80%.<>

Keywords

III-V semiconductors; aluminium compounds; gallium arsenide; laser mirrors; quantum well lasers; ridge waveguides; sputter etching; waveguide lasers; 90/spl deg/ turning mirrors; ECR etch quality; GaAs-AlGaAs; GaAs-AlGaAs multiple-quantum-well lasers; MQW lasers; average reflection coefficient; electron-cyclotron resonance etching; etched laser mirrors; etched mirror facets; etched ridge lasers; etching parameters; fabrication; masking materials; mirrors; monolithic integration; multiple etch depths; optical circuits; optoelectronic fabrication; reflection coefficients; ridge-guided lasers; Electron optics; Etching; Integrated optics; Mirrors; Monolithic integrated circuits; Optical device fabrication; Optical reflection; Quantum well devices; Resonance; Waveguide lasers;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.388738

Filename

388738