Ultrathin amorphous carbon overcoats by filtered cathodic arc deposition

Author

Yamamoto, Takayuki ; Hyodo, Hiroyuki ; Tsuchitani, Shigeki ; Kaneko, Reizo

Author_Institution

Fujitsu Ltd., Kawasaki, Japan

Volume

39

Issue

5

fYear

2003

Firstpage

2201

Lastpage

2204

Abstract

We studied properties of 2- to 25-nm-thick tetrahedral amorphous carbon films produced by filtered cathodic arc deposition. We found that nitrogen doping was effective in controlling film properties. Both the amount of sp³ bonding in the film and the hardness decreased with nitrogen incorporation. The adhesion of lubricant to the carbon film was improved by nitrogen doping. Tests of wear and corrosion on a nanometer scale showed the superior tribological and anticorrosion performance of tetrahedral amorphous carbon films over hydrogenated amorphous carbon films.

Keywords

adhesion; amorphous state; bonds (chemical); carbon; corrosion protective coatings; hard discs; hardness; plasma deposition; wear resistant coatings; 2 to 25 nm; C:N; anticorrosion performance; corrosion resistance; durability; film properties control; filtered cathodic arc deposition; hard disk drives; hardness; lubricant adhesion; nanometer scale tests; nitrogen doping; sp³ bonding; tetrahedral amorphous carbon films; tribological performance; ultrathin amorphous carbon overcoats; wear; Amorphous magnetic materials; Amorphous materials; Bonding; Cathodes; Corrosion; Doping; Magnetic heads; Magnetic recording; Magnetic separation; Nitrogen;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2003.817065

Filename

1233436