• DocumentCode
    793185
  • Title

    Exact extraction of piezoresistance coefficient using flat membrane

  • Author

    Gniazdowski, Zenon

  • Author_Institution
    Inst. of Electron Technol., Warsaw, Poland
  • Volume
    6
  • Issue
    1
  • fYear
    2006
  • Firstpage
    160
  • Lastpage
    165
  • Abstract
    The method for the extraction of piezoresistance coefficients with the use of a flat membrane as a test structure is considered. The necessary and sufficient conditions and conditioning of the extraction problem are examined as a problem of a correct test structure. For the given condition number, the number of the error propagation of the input data is considered.
  • Keywords
    membranes; piezoresistance; piezoresistive devices; resistors; semiconductor device testing; error propagation; parameter extraction; piezoresistance coefficient; piezoresistive devices; Biomembranes; Differential equations; Electrical resistance measurement; Piezoresistance; Piezoresistive devices; Resistors; Silicon; Stress; Sufficient conditions; System testing; Piezoresistance; parameter extraction; piezoresistive devices;
  • fLanguage
    English
  • Journal_Title
    Sensors Journal, IEEE
  • Publisher
    ieee
  • ISSN
    1530-437X
  • Type

    jour

  • DOI
    10.1109/JSEN.2005.855579
  • Filename
    1576766
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=793185