• DocumentCode
    794925
  • Title

    The Use of an Energy Dispersive X-Ray Analyzer in Scanning Electron Microscopy

  • Author

    Elad, E. ; Sandborg, A.O. ; Russ, J.C. ; Van Gorp, T.

  • Author_Institution
    Nuclear Diodes, Inc., Prairie View, Ill.
  • Volume
    17
  • Issue
    1
  • fYear
    1970
  • Firstpage
    354
  • Lastpage
    362
  • Abstract
    The application of a high resolution semiconductor energy dispersive x-ray analyzer in scanning electron microscopy is described. Optimum specifications of an x-ray spectrometer for such application are outlined and various problems related to detection of low energy x-rays are discussed. Characteristic x-rays of elements down to oxygen were detected with the described system, making it useful for a variety of industrial and research applications.
  • Keywords
    Biomedical optical imaging; Dispersion; Electron beams; Electron optics; Energy resolution; Optical microscopy; Probes; Scanning electron microscopy; Spectroscopy; Transmission electron microscopy;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.1970.4325597
  • Filename
    4325597
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=794925