Magnetic properties of Fe based compositionally modulated nitride alloy films

In the Co-metal based compositionally modulated nitride alloy films, we have noted the fact that the affinity in regards to nitrogen differs among metal elements such as Co and Nb. We have examined systems which contain the metallic elements (Nb) and metalloid elements (B) which have a strong affinity towards nitrogen as Fe-based compositionally modulated nitride alloy films. Based on this, the compositionally modulated nitride alloy films in the Fe-Nb alloys and the Fe-Nb-Si-B alloys show high saturation magnetization and good soft magnetic properties after high temperature annealing. Thus, their suitability as soft magnetic alloy films for use with magnetic heads has become clear. Herein, we report on Fe-based compositionally modulated nitride alloy films. Using the reactive sputtering method, Fe-based compositionally modulated nitride alloy film (CMNF) was formed.