DocumentCode
795928
Title
External circuit system effects on chlorine plasma instabilities
Author
Ellingboe, A.R. ; Law, V.J. ; Soberon, F. ; Garcia, F. ; Graham, W.
Author_Institution
Nat. Centre for Plasma Sci. & Technol., Dublin City Univ., Ireland
Volume
41
Issue
9
fYear
2005
fDate
4/28/2005 12:00:00 AM
Firstpage
525
Lastpage
526
Abstract
The effects of the external circuit on plasma instabilities in an inductive plasma source are investigated. The instabilities are found to be asymmetric with respect to the circuit input impedance. A simplified model of the antenna-plasma coupling provides an explanation of the asymmetry.
Keywords
antennas in plasma; chlorine; electric impedance; equivalent circuits; plasma chemistry; plasma instability; plasma sources; Cl; antenna plasma coupling; asymmetric instability; chlorine plasma instability; circuit input impedance; external circuit system; inductive plasma source;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20050424
Filename
1426562
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