Crystallographic Orientation and Magnetic Properties of Fe-O and Fe-O-N Films Deposited by ECR Sputtering Method

Oxygen was introduced into the Ar sputtering atmosphere during deposition of iron films. It was found that oxygen dramatically enhances the [100] orientation of the iron films, while no sign of oxide formation was found in X-ray diffraction patterns, X-ray photoelectron spectra, or measured magnetic properties. Films deposited with nitrogen introduced together with oxygen during sputtering were also studied. Results revealed that even a small amount of nitrogen prevents the iron film from assuming the [100] orientation.