Moving Tunable Filters Forward: A "Heterointegration" Research Project for Tunable Filters Combining MEMS and RF SAW/BAW Technologies

Author

Hashimoto, Ken-ya ; Kimura, Tetsuya ; Matsumura, Takeshi ; Hirano, Hideki ; Kadota, Michio ; Esashi, Masayoshi ; Tanaka, Shuji

Author_Institution

Grad. Sch. of Eng., Chiba Univ., Chiba, Japan

Volume

16

Issue

7

fYear

2015

fDate

Aug. 2015

Firstpage

89

Lastpage

97

Abstract

This article discusses the possibility of tunable RF surface-acoustic-wave (SAW) and bulkacoustic-wave (BAW) filters using varactors (VCs) integrated by the skillful use of micro-electromechanical system (MEMS) technologies. First, the reasons that RF tunable filters are in demand for current wireless communications are explored, and various RF tunable filters are surveyed and compared. Next comes a discussion of tunable RF SAW/BAW filters combined with MEMS technologies, showing that high performance can be expected, provided that some key technologies are developed. Finally, the article introduces tunable SAW filters, which the authors developed in a research project called "heterointegration" to demonstrate what is possible by combining MEMS technologies with RF SAW/BAW technologies.

Keywords

bulk acoustic wave devices; micromechanical devices; radiofrequency filters; surface acoustic wave filters; varactors; MEMS technologies; RF BAW technologies; RF SAW technologies; RF tunable filters; VC; bulkacoustic-wave filters; heterointegration research project; microelectromechanical system; surface-acoustic-wave filters; tunable RF BAW filters; tunable RF SAW filters; varactors; wireless communications; Acoustic waves; MIMO; Radio frequency; Tunable filters;

fLanguage

English

Journal_Title

Microwave Magazine, IEEE

Publisher

ieee

ISSN

1527-3342

Type

jour

DOI

10.1109/MMM.2015.2431237

Filename

7153063