Microendoscopic Confocal Imaging Probe Based on an LVD Microlens Scanner

Author

Jain, Ankur ; Xie, Huikai

Author_Institution

Dept. of Electr. & Comput. Eng., Florida Univ., Gainesville, FL

Volume

13

Issue

2

fYear

2007

Firstpage

228

Lastpage

234

Abstract

This paper reports a microendoscopic confocal imaging probe based on a large-vertical-displacement (LVD) microlens scanner. Photoresist reflow technique is used to form a microlens on a lens holder that is integrated with a LVD microactuator. With a footprint of 3 mmtimes2 mm, the LVD microlens scanner can vertically displace the integrated polymer microlens by 0.7 mm at a dc voltage of 23 V. The LVD microlens chip is directly packaged into a 5-mm-diameter imaging probe. The architecture of the imaging probe is very simple and is just composed of this microlens, a GRIN rod lens (Oslash1.8 mm), a metal mold, and a cover

Keywords

endoscopes; fibre optic sensors; gradient index optics; image sensors; integrated optics; micro-optomechanical devices; microactuators; microlenses; optical microscopy; optical polymers; optical scanners; photoresists; 2 mm; 23 V; 3 mm; 5 mm; GRIN rod lens; confocal imaging probe; integrated polymer microlens; large-vertical-displacement microlens scanner; microactuator; microendoscopic imaging probe; microlens chip; photoresist reflow technique; Biomedical optical imaging; Focusing; High-resolution imaging; Image resolution; Lenses; Microoptics; Optical imaging; Optical microscopy; Probes; Voltage; Electrothermal actuation; large vertical displacement (LVD); microactuators; microelectromechanical systems (MEMS); optical confocal microscopy; optical scanners;

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/JSTQE.2007.893112

Filename

4159975