DocumentCode
813400
Title
Submicronic thermal imaging by wavelength multiplexed photoreflectance technique
Author
Holé, S. ; Tessier, G. ; Filloy, C. ; Fournier, D.
Author_Institution
Lab. des Instruments et Syst. d´´ile de France, Univ. Pierre et Marie Curie, Paris, France
Volume
38
Issue
17
fYear
2002
fDate
8/15/2002 12:00:00 AM
Firstpage
986
Lastpage
987
Abstract
High resolution temperature imaging techniques are necessary to optimise designs and detect failures of integrated circuits. An improved photoreflectance technique using simultaneous multiwavelength illumination is presented in order to probe optimally each material of integrated circuits and reduce drifts. It makes it possible to rapidly highlight hot-spots, a typical failure precursor
Keywords
CCD image sensors; failure analysis; infrared imaging; inspection; integrated circuit testing; photoreflectance; CCD cameras; aliasing; camera image sampling; failure precursor; fast temperature modulation; high resolution imaging; hot-spots; integrated circuits; multiplexed multichannel system; simultaneous multiwavelength illumination; submicron thermal imaging; wavelength multiplexed photoreflectance;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20020685
Filename
1031801
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