Modeling and design optimization of large-deflection piezoelectric folded cantilever microactuators

Author

Huajun Fang ; Litian Liu ; Tianling Ren

Author_Institution

Inst. of Microelectron, Tsinghua Univ., Beijing, China

Volume

53

Issue

1

fYear

2006

Firstpage

237

Lastpage

240

Abstract

This paper presents a novel, large-deflection piezoelectric folded cantilever microactuator (PFCM). A multimorph model for the large-deflection PFCM is derived, in which unified formulas for deflection angle and vertical displacement of N-level PFCM are obtained. Based on the model, multilayer PFCMs using PZT film are designed and optimized. The large-deflection PFCM is extensively applicable to microdevices or microsystem applications such as micro-optical switches, microelectromechanical systems (MEMS) scanners, and so forth.

Keywords

cantilevers; design engineering; microactuators; optimisation; piezoelectric actuators; PZT film; deflection angle; large-deflection piezoelectric folded cantilever microactuators; microdevices; microsystem applications; multimorph model; vertical displacement; Buffer layers; Design optimization; Electrodes; Microactuators; Microelectromechanical systems; Micromechanical devices; Nonhomogeneous media; Piezoelectric actuators; Silicon; Voltage; Computer Simulation; Computer-Aided Design; Elasticity; Electrochemistry; Equipment Design; Equipment Failure Analysis; Miniaturization; Models, Theoretical; Motion; Stress, Mechanical; Transducers; Ultrasonography;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2006.1588409

Filename

1588409