Surface acoustic wave velocity in single-crystal AlN substrates

Author

Bu, Guangquan ; Ciplys, D. ; Shur, M. ; Schowalter, L.J. ; Schujman, S. ; Gaska, R.

Author_Institution

Dept. of Electr., Comput., & Syst. Eng., Rensselaer Polytech. Inst., Troy, NY, USA

Volume

53

Issue

1

fYear

2006

Firstpage

251

Lastpage

254

Abstract

The surface acoustic wave velocity has been measured on a-plane (c-propagation) and c-plane oriented bulk aluminum nitride (AlN) single crystals using the S/sub 11/-parameter method in the frequency range 160-360 MHz. The SAW velocity is 5760 m/s for both orientations. From comparison of this value with the simulations using various elastic constants of AlN available in literature, we estimated the elastic constant C/sub 44/ to be 122 /spl plusmn/ 1 GPa.

Keywords

S-parameters; acoustic wave velocity; aluminium compounds; elastic constants; piezoelectric materials; surface acoustic waves; 160 to 360 MHz; 5760 m/s; AlN; S/sub 11/-parameter method; SAW velocity; c-propagation; elastic constants; single-crystal substrates; surface acoustic wave velocity; Acoustic measurements; Acoustic waves; Aluminum nitride; Crystalline materials; Crystals; Extraterrestrial measurements; Physics; Piezoelectric materials; Surface acoustic waves; Velocity measurement;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2006.1588412

Filename

1588412