• DocumentCode
    815033
  • Title

    Projection pursuit for analyzing data from semiconductor environments

  • Author

    Rohatsch, Tobias ; Pöppel, Gerhard ; Werner, Henrich

  • Author_Institution
    Infineon Technol. AG, Regensburg, Germany
  • Volume
    19
  • Issue
    1
  • fYear
    2006
  • Firstpage
    87
  • Lastpage
    94
  • Abstract
    Complex environments with complex productions lead to complex data; this certainly applies to the work on semiconductors. Acquiring the data offers a challenge, and the challenge only grows when attempting to analyze the data structures and dependencies. We put forward the well-known Projection Pursuit method; it has apparently not yet been used so far in the production of semiconductors. Extensions of this method are introduced which include robust index functions, new optimizing strategies, and an approach to analyzing the dependencies between different groups of variables.
  • Keywords
    data analysis; data structures; production engineering computing; semiconductor device manufacture; data acquisition; data analysis; data structures; projection pursuit method; robust index functions; semiconductor production; Data analysis; Data structures; Lead compounds; Optimization methods; Pressure measurement; Process control; Production; Robustness; Testing; Thickness measurement; Data analysis; Projection Pursuit (PP) method; semiconductor environment; structure detection;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2005.863212
  • Filename
    1588866