Dosimetry in linac electron-beam environments [microelectronic packages]

Author

Beutler, D.E. ; Lorence, L.J., Jr. ; Brown, D.B.

Author_Institution

Sandia Nat. Lab., Albuquerque, NM, USA

Volume

38

Issue

6

fYear

1991

fDate

12/1/1991 12:00:00 AM

Firstpage

1171

Lastpage

1179

Abstract

The relationship between dose in TLDs and dose in packaged microelectronic devices as a function of electron beam energy is calculated using the CEPXS/ONELD radiation transport code. The effects of adjacent materials, including TLDs, upon the energy deposition in the device are also discussed. The calculations indicate that dosimetry errors for linac electron beam environments (electron energies >12 MeV) can be made less than 5% if appropriate materials and geometries are used. The CEPXS/ONELD code provides a powerful tool for dosimetry analysis in electron-beam environments

Keywords

dosimetry; electron beam effects; electronic engineering computing; integrated circuit testing; nuclear engineering computing; packaging; 6 to 60 MeV; CEPXS/ONELD radiation transport code; TLDs; dosimetry analysis; dosimetry errors; electron beam energy; energy deposition; linac electron-beam environments; packaged microelectronic devices; Absorption; Composite materials; Dosimetry; Electron beams; Laboratories; Linear particle accelerator; Microelectronics; Packaging; Performance evaluation; Testing;

fLanguage

English

Journal_Title

Nuclear Science, IEEE Transactions on

Publisher

ieee

ISSN

0018-9499

Type

jour

DOI

10.1109/23.124090

Filename

124090