Error correction technique for dynamic impedance measurement

In this paper, a numerical model of a commercial instrument to measure the electrical properties of semiconductor devices is presented. Numerical simulation results are compared with experimental data, and it is shown that the model can accurately describe the equipment behavior. As a consequence, it can be used to correct systematic errors, increasing the accuracy of the instrument results. The technique described here is based upon the higher accuracy of an element in the measurement chain of the instrument, the analog-to-digital converter, when compared with the dominant error source.