DocumentCode
825277
Title
Ratio for polycrystalline silicon used in disk-shaped microresonators
Author
Meitzler, A.H.
Volume
53
Issue
2
fYear
2006
Firstpage
264
Abstract
Integrated circuit technology has been used to fabricate miniature disk resonators of polycrystalline silicon that operate at frequencies above 100 MHz. The ratios of low-order resonant frequencies in these resonators can be used to determine the value of Poisson´s ratio and to confirm assumptions regarding homogeneity and isotropy.
Keywords
Poisson ratio; discs (structures); elemental semiconductors; integrated circuit technology; micromechanical resonators; silicon; Poisson ratio; Si; disk-shaped microresonators; homogeneity; integrated circuit technology; isotropy; low-order resonant frequencies; Circuits; Electronic mail; Fabrication; Frequency measurement; Grain size; Microcavities; Micromechanical devices; Resonant frequency; Silicon; Vibration measurement; Computer Simulation; Crystallization; Elasticity; Equipment Design; Equipment Failure Analysis; Models, Chemical; Silicon; Stress, Mechanical; Transducers; Vibration;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/TUFFC.2006.1593363
Filename
1593363
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