Microfabricated electrohydrodynamic (EHD) pumps for liquids of higher conductivity

A traveling-wave-driven electrohydrodynamic micropump without moving parts is discussed. The fundamental operating principles, such as high-frequency traveling waves, a self-stabilizing temperature gradient, and increased wave number, are outlined. The main advantages of the realized pump are its ability to move conductive liquids such as water and weak electrolyte solutions, the lack of any movable parts, and integration. A microfabricated structure demonstrating the pump operation is outlined, and quantitative results are described. Typical parameters characterizing the advantages and limitations of the pumping principle are discussed. Perspectives for optimization of the realized micropump can be seen in further miniaturization and increased number of electrodes. Possible applications are biological, medical, and chemical devices that can deliver accurately metered quantities of fluids in the nl/min and μl/min range