• DocumentCode
    841821
  • Title

    Measurement method of pn junction depth using light spectrum response

  • Author

    Yie, H.

  • Author_Institution
    Microelectronics Center, Southeast Univ., Nanjing, China
  • Volume
    27
  • Issue
    23
  • fYear
    1991
  • Firstpage
    2196
  • Lastpage
    2197
  • Abstract
    Using a one-dimensional photodiode simulator, the light spectrum response of a pn junction structure is analysed and a monotonic relationship of the wavelength of the peak response against pn junction depth is derived. Based on this, an optical measurement method for pn junction depth is presented. Some experimental results support the validity of the presented method.
  • Keywords
    p-n homojunctions; photodiodes; spatial variables measurement; experimental results; light spectrum response; one-dimensional photodiode simulator; optical measurement method; peak response wavelength; pn junction depth measurement; pn junction structure;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19911358
  • Filename
    104120
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=841821