Deconvolution of High Energy Edge of Noise Distorted Backscattering Spectra

A procedure for deconvoluting high energy leading edge of noise distorted backscattering spectra measured by surface barrier detector systems is presented. This procedure is based on two assumptions: (i) The undistorted spectrum can be represented as a polynomial function of the energy of the backscattered ions, relative to the maximum energy of ions back-scattered from the impurity, with unknown expansion coefficients; (ii) The observed distorted spectrum is the gaussian spread of the undistorted spectrum. The spread is characterized by ¿, the rms value of a monoenergetic ion beam scattered from a single layer of impurity atoms. This generates a set of "spread" coefficients which depend only upon the energies in (i) and ¿ in (ii). The derivative of various order of the high energy edge of the distorted spectrum provide the values of the unknown polynomial expansion coefficients.