• DocumentCode
    845395
  • Title

    New actuation method for push-pull electrostatic MEMS comb drive

  • Author

    Zhao, Tao ; Liang, Yung C.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore
  • Volume
    50
  • Issue
    6
  • fYear
    2003
  • Firstpage
    1337
  • Lastpage
    1339
  • Abstract
    In this paper, a new actuation scheme for the push-pull electrostatic microelectromechanical systems comb drive actuators is proposed. The displacement amplitude excited by the new form of driving voltages can be more than three times as large as that which is achievable using the conventional form for the same applied system voltage.
  • Keywords
    drives; electrostatic actuators; microactuators; micromechanical devices; actuation method; applied system voltage; displacement amplitude; driving voltages; push-pull electrostatic MEMS comb drive; Electrodes; Electronic ballasts; Electrostatics; Equations; Fingers; Microelectromechanical systems; Micromechanical devices; Microstructure; Switching frequency; Voltage control;
  • fLanguage
    English
  • Journal_Title
    Industrial Electronics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0278-0046
  • Type

    jour

  • DOI
    10.1109/TIE.2003.819567
  • Filename
    1254641
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=845395