• DocumentCode
    846055
  • Title

    Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels [dimension measurement]

  • Author

    Tanaka, Mitsuru ; Yamagami, Tohru ; Nakayama, Kan

  • Author_Institution
    Nat. Res. Lab. of Metrol., Ysukuba, Japan
  • Volume
    38
  • Issue
    2
  • fYear
    1989
  • fDate
    4/1/1989 12:00:00 AM
  • Firstpage
    552
  • Lastpage
    554
  • Abstract
    Heterodyne laser interferometry and its accuracy at subnanometer levels are discussed. The simplest optical nonpolarization heterodyne interferometer is tested experimentally to understand and reduce fringe distortion. An accuracy of 0.1 nm for the 633-nm He-Ne laser interferometer is achieved
  • Keywords
    calibration; helium; light interferometers; measurement by laser beam; measurement errors; neon; spatial variables measurement; 633 micron; He-Ne; fringe distortion; heterodyne laser interferometer; linear interpolation; nonpolarization heterodyne interferometer; periodic error; subnanometer levels; Electric variables measurement; Interpolation; Laser noise; Optical distortion; Optical interferometry; Optical mixing; Optical modulation; Optical polarization; Optical sensors; Phase measurement;
  • fLanguage
    English
  • Journal_Title
    Instrumentation and Measurement, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9456
  • Type

    jour

  • DOI
    10.1109/19.192345
  • Filename
    192345
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=846055