High-quality solenoid inductor using dielectric film for multichip modules

Author

Yook, Jong-Min ; Ko, Ju-Hyun ; Ha, Man-Lyun ; Kwon, Young-Se

Author_Institution

Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Daejon, South Korea

Volume

53

Issue

6

fYear

2005

fDate

6/1/2005 12:00:00 AM

Firstpage

2230

Lastpage

2234

Abstract

For multilayer applications, we made high-quality and easily fabricated solenoid inductors using a dielectric material (UPILEX-S, UBE Industries, Tokyo, Japan). These inductors fabricated on UPILEX-S had a larger Q factor compared to that of a spiral inductor fabricated on a silicon or GaAs substrate. Furthermore, it is possible to stack these inductors to make multichip modules using solder or gold stud bumps. From the measurement, solenoid inductors fabricated on 50-μm-thick film showed very high Q factors and stable inductances.

Keywords

Q-factor; dielectric materials; dielectric thin films; multichip modules; solenoids; thin film inductors; 50 micron; Q factor; UBE Industries; UPILEX-S; dielectric film; dielectric material; gold stud bump; multichip module; multilayer application; solder bump; solenoid inductor; Dielectric films; Dielectric materials; Gallium arsenide; Multichip modules; Nonhomogeneous media; Q factor; Silicon; Solenoids; Spirals; Textile industry; Dielectric; UPILEX film; multichip module (MCM); solenoid;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/TMTT.2005.848775

Filename

1440744