DocumentCode

848238

Title

Epitaxial Integrated E-dE Silicon Detector with a Buried Low-Resistive Diffused Layer

Author

Kim, C. ; Kim, H. ; Kikuchi, K. ; Husimi, K. ; Ohkawa, S. ; Fuchi, Y.

Author_Institution

Department of Electronics Engineering, Korea University, Kodaira, Tokyo 187, Japan

Volume

27

Issue

1

fYear

1980

Firstpage

258

Lastpage

265

Keywords

Detectors; Diodes; Etching; Fabrication; Impurities; Ion implantation; Silicon; Substrates; Telescopes; Wire;

fLanguage

English

Journal_Title

Nuclear Science, IEEE Transactions on

Publisher

ieee

ISSN

0018-9499

Type

jour

DOI

10.1109/TNS.1980.4330836

Filename

4330836