New surface morphology for low stress thin-film-coated thermal neutron detectors

Author

McGregor, Douglas S. ; Klann, Raymond T. ; Gersch, Holly K. ; Ariesanti, Elsa ; Sanders, Jeffrey D. ; VanDerElzen, Brian

Author_Institution

Dept. of Mech. & Nucl. Eng., Kansas State Univ., Manhattan, KS, USA

Volume

49

Issue

4

fYear

2002

fDate

8/1/2002 12:00:00 AM

Firstpage

1999

Lastpage

2004

Abstract

Experimental devices using patterns of holes etched into semiconductor surfaces are under evaluation for use as neutron detectors. The devices have miniature holes equidistantly spaced so as to completely cover the front surface of a planar semiconductor device. The devices have both electrical contacts and neutron-reactive coatings applied over the surface and within the holes. The tiny holes assist in thin-film adhesion while offering a method to increase the thermal-neutron detection efficiency.

Keywords

gallium arsenide; neutron detection; scanning electron microscopy; semiconductor counters; surface structure; thin film devices; ¹⁰B coating; B; GaAs; GaAs detectors; SEM; electrical contacts; holes; semiconductor detectors; semiconductor surfaces; surface morphology; thermal neutron detectors; thermal-neutron detection efficiency; thin-film adhesion; Adhesives; Coatings; Contacts; Detectors; Etching; Neutrons; Semiconductor devices; Semiconductor thin films; Surface morphology; Thermal stresses;

fLanguage

English

Journal_Title

Nuclear Science, IEEE Transactions on

Publisher

ieee

ISSN

0018-9499

Type

jour

DOI

10.1109/TNS.2002.801697

Filename

1043626