Monochromatic imaging of scattered laser light from in situ generated particles in plasmas

Author

Hareland, Willard A. ; Buss, Richard J. ; Brown, Douglas A. ; Collins, Sean M.

Author_Institution

Sandia Nat. Labs., Albuquerque, NM, USA

Volume

24

Issue

1

fYear

1996

fDate

2/1/1996 12:00:00 AM

Firstpage

103

Lastpage

104

Abstract

Spatially resolved images of particle distributions are measured in steady-state plasmas in a GEC (gaseous electronics conference) plasma reactor. Images are obtained by monochromatic imaging of scattered laser light using a microchannel plate (MCP) image intensifier and a high-speed video camera. The observed distributions of particulates generated by adding small quantities of CHF₃ to an argon plasma are extremely complex and diverse. The patterns observed are temporally varying, and rarely as simple as domes and rings observed in other reactors. The forces acting on the particles are sufficiently complex that reproducing specific spatial patterns by controlling processing parameters is often impossible

Keywords

argon; plasma confinement; plasma devices; plasma diagnostics; plasma impurities; plasma light propagation; Ar plasma; GEC plasma reactor; gaseous electronics conference plasma reactor; high-speed video camera; in situ generated particles; microchannel plate image intensifier; monochromatic imaging; particle forces; particulate distributions; scattered laser light; spatial patterns; spatially resolved images; steady-state plasmas; temporally varying patterns; trifluoromethane additive; Gas lasers; Image resolution; Inductors; Light scattering; Microchannel; Particle measurements; Particle scattering; Plasma measurements; Spatial resolution; Steady-state;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.491733

Filename

491733