Thermal distribution during destructive pulses in ESD protection devices using a single-shot two-dimensional interferometric method

Author

Pogany, Dionyz ; Bychikhin, Sergey ; Kuzmik, Jan ; Dubec, Viktor ; Jensen, Nils ; Denison, Marie ; Groos, Gerhard ; Stecher, Matthias ; Gornik, Erich

Author_Institution

Inst. for Solid State Electron., Vienna Univ. of Technol., Austria

Volume

3

Issue

4

fYear

2003

Firstpage

197

Lastpage

201

Abstract

Thermal distribution during single destructive electrostatic discharge (ESD) events is investigated in smart power ESD protection devices using a two-dimensional holographic interferometry technique. The hot spot dynamics and the position of destructive current filaments is correlated with the thermal distribution under the nondestructive conditions and with the failure analysis results.

Keywords

electrostatic devices; electrostatic discharge; failure analysis; holographic interferometry; power semiconductor devices; semiconductor device testing; temperature distribution; thermal diffusion; destruction mechanisms; destructive current filaments; destructive pulses; device failure; failure analysis; hot spot dynamics; photothermal effects; semiconductor device testing; single destructive electrostatic discharge; single-shot two-dimensional interferometric method; smart power ESD protection devices; thermal distribution; thermooptic effects; two-dimensional holographic interferometry; Electrostatic discharge; Electrostatic interference; Failure analysis; Holography; Interferometry; Laser beams; Optical pulses; Probes; Protection; Thermal conductivity;

fLanguage

English

Journal_Title

Device and Materials Reliability, IEEE Transactions on

Publisher

ieee

ISSN

1530-4388

Type

jour

DOI

10.1109/TDMR.2003.818382

Filename

1261735