• DocumentCode
    869829
  • Title

    Use of Axially Symmetric Electrostatic Fields for Ion Beam Focussing

  • Author

    Colton, Eugene ; Kelly, J.C.

  • Author_Institution
    Physics Division, Argonne National Laboratory, Argonne, Illinois, 60439
  • Volume
    30
  • Issue
    4
  • fYear
    1983
  • Firstpage
    2734
  • Lastpage
    2736
  • Abstract
    The l/r electric field obtained between charged coaxial cylindrical electrodes is useful for focussing hollow ion beams in ion microprobe and ion implantation applications. The focussing strengths are mass independent at nonrelativistic energies. Focussed particle densities can be enhanced by using a diverging-converging pair to flatten the dependence of focal length on incoming beam radius. Transport of 425 keV and 1 MeV protons has been simulated and results are presented.
  • Keywords
    Coaxial components; Electrodes; Electrostatics; Equations; Ion beams; Laboratories; Lenses; Physics; Protons; Voltage;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.1983.4332939
  • Filename
    4332939