• DocumentCode
    870406
  • Title

    Secondary emission formulas

  • Author

    Vaughan, Rodney

  • Author_Institution
    Litton Electron Devices, San Carlos, CA, USA
  • Volume
    40
  • Issue
    4
  • fYear
    1993
  • fDate
    4/1/1993 12:00:00 AM
  • Firstpage
    830
  • Abstract
    A minor revision is made to the author´s `A New Formula for Secondary Emission Yield´ (ibid., vol.36, no.9, p.1963-7, September 1989) based on the work of A. Shih and C. Hor reported elsewhere in this issue (ibid. vol.40, no.4, p.824-9, Apr. 1993)
  • Keywords
    secondary electron emission; revision; secondary emission formulas; Analytical models; Electron devices; Electron emission; Equations; Integrated circuit modeling; Rough surfaces; Surface cleaning; Surface roughness; Surface texture; Voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.202798
  • Filename
    202798